| 000 | 00371nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 221007s9999 xx 000 0 und d | ||
| 100 | _aCambell Stephen A. | ||
| 245 | 4 | _aThe Science and Engineering of Microelctronic Fabrication | |
| 250 | _a2nd | ||
| 260 |
_aOxford Uni Press, New Delhi _bOxford Uni Press, New Delhi _c2012 |
||
| 300 | _a603 | ||
| 942 | _cBK | ||
| 999 |
_c3785 _d3785 |
||