000 | 00492nam a2200157Ia 4500 | ||
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005 | 20240502164340.0 | ||
008 | 221007s9999 xx 000 0 und d | ||
082 | _a621.395 GAR | ||
100 | _aMcGuire Gary E. | ||
245 | 0 | _aSemiconductor Materials and Process Technology Handbook : For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI) | |
250 | _a1st Impr. | ||
260 |
_aJaico Pub, Mumbai _bJaico Pub, Mumbai _c2007 |
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300 | _a675 | ||
942 | _cBK | ||
942 | _n0 | ||
999 |
_c3571 _d3571 |