000 00492nam a2200157Ia 4500
005 20240502164340.0
008 221007s9999 xx 000 0 und d
082 _a621.395 GAR
100 _aMcGuire Gary E.
245 0 _aSemiconductor Materials and Process Technology Handbook : For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)
250 _a1st Impr.
260 _aJaico Pub, Mumbai
_bJaico Pub, Mumbai
_c2007
300 _a675
942 _cBK
942 _n0
999 _c3571
_d3571