TY  - BOOK
AU  - McGuire Gary E.
TI  - Semiconductor Materials and Process Technology Handbook : For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)
U1  - 621.395 GAR 
PY  - 2007///
CY  - Jaico Pub, Mumbai
PB  - Jaico Pub, Mumbai
ER  -